Non-contact ultra-precision air servo length measuring instrument
A precise displacement gauge that can measure any material as long as it is a solid that does not allow air to pass through.
Non-contact measurement through an air film causes no workpiece damage. Scale resolution is 20 nm. High reproducibility ±2σ = ±0.2 μm. No restrictions on the material of the measured object. Highly environmentally resistant, capable of measurement even in high temperature and humidity. Measurement range is 10 mm. Movement range is 16 mm. Averaged measurement on rough surfaces with a φ0.5 mm pot.
- 企業：エスイーエス研究所
- 価格：Other
